Electromagnetic Microactuators using Non-spiral Planar Microcoils for Robotic Applications

Abstract

Electromagnetic microactuators offer several advantages for robotic applications such as relatively large stroke and low input voltage requirements. Micro coils are significant components for electromagnetic microactuators for generating force required for micro robots. Non-spiral planar microcoils of square and circular geometries are analyzed here considering the fabrication easiness and low power consumption of non-spiral planar coils. Microfabrication of non-spiral planar coil is simpler and requires a single mask process only. Comparison between non-spiral coils and conventional spiral coils are also discussed. Series resistance of non-spiral coil is found out to be lesser than that of spiral coils though magnetic field is slightly lesser for non-spiral coils. The fabrication advantages and low power dissipation of non-spiral structures make them a strong alternative for conventional spiral planar microcoils. Comparison of different planar microcoils shows that the circular non-spiral coil gives better performance than other coil geometries considered here for robotic applications. Circular coil is found to provide a uniform field with lesser parasitic resistance. Electromagnetic microactuator using non-spiral planar circular and square microcoils are also analyzed to compare the performance between the two coil types. The results show that the force generated using non-spiral circular microcoil in the microactuator is adequate for microrobotic applications with an added advantage of uniform magnetic field provided by the circular coils