Browsing by Subject "extrinsic Fabry–Perot interferometer pressure sensors; Fabry–Perot interferometers; fiberoptic sensors; anodic bonding; span of pressure sensor; optical microelectromechanical system pressure sensors; deflection sensitivity"
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2017-01 | Suppression of span in sealed microcavity Fabry-Perot pressure sensors | Chandra, Sudhir |