Browsing by Subject "extrinsic Fabry–Perot interferometer pressure sensors; Fabry–Perot interferometers; fiberoptic sensors; anodic bonding; span of pressure sensor; optical microelectromechanical system pressure sensors; deflection sensitivity"

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Issue DateTitleAuthor(s)
2017-01Suppression of span in sealed microcavity Fabry-Perot pressure sensorsChandra, Sudhir